Substrate, liquid crystal display device, and method of manufacturing the same

ABSTRACT

A liquid crystal display apparatus includes first and second substrates, a fence, a liquid crystal layer and a plurality of spacers. The first substrate includes a display region for displaying an image. The second substrate faces the first substrate. The fence is disposed between the first substrate and the second substrate. The fence surrounds the display. The spacers maintain the distance between the first and second substrates. The spacers have a gradually increasing compression ratio in a direction from a center of the display region to an edge of the display region. The liquid crystal display apparatus maintains a uniform cell gap, even though a compressive stress of a center portion of the liquid crystal display apparatus is different with a compressive stress of an edge portion of the liquid crystal display apparatus. Therefore, display quality is enhanced.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No. 10/643,934filed on Aug. 20, 2003 now U.S. Pat. No. 7,253,868, which claimspriority under 35 U.S.C. § 119 to Korean Patent Application No.2002-49576 filed on Aug. 21, 2002, Korean Patent Application No.2002-60498 filed on Oct. 4, 2002 and Korean Patent Application No.2002-66617 filed on Oct. 30, 2002, the disclosures of which are allincorporated by reference herein in their entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a substrate that is used for a liquidcrystal display device, a liquid crystal display device having thesubstrate and a method of manufacturing the liquid crystal displaydevice, and more particularly to a substrate that maintains a uniformcell gap in spite of self-weight, a liquid crystal display device havingno unfilled-region, and a manufacturing the liquid crystal displaydevice preventing the overflow of the liquid crystal molecules.

2. Description of the Related Art

Generally, a liquid crystal display device includes a thin filmtransistor substrate, a color filter substrate and a liquid crystallayer interposed between the thin film transistor and the color filtersubstrate.

When a thickness of the liquid crystal layer (or a cell gap between thethin film transistor substrate and the color filter substrate) isnon-uniform, a display quality of the liquid crystal display device isdeteriorated.

A spacer is interposed between the thin film transistor substrate andthe color filter substrate, so as to maintain the cell gap between thethin film transistor substrate and the color filter substrate.

The spacer has a spherical shape or a column-shape. The spacer that hasa spherical shape is referred to as a ball spacer. The spacer that has acolumn-shape is referred to as a rigid spacer.

A diameter of the ball spacer is only a few μm. The ball spacer isscattered on the color filter substrate or on the thin film transistorsubstrate.

The ball spacer has demerits as follows.

Firstly, the ball spacer is deformable and scattered irregularly, sothat the cell gap is not uniform. Secondly, a liquid crystal moleculenear the ball spacer is abnormally arranged to lower a luminance.Thirdly, reducing the diameter of the ball spacer is very hard, so thatmaking a short cell gap is also very hard. Fourthly, the ball spacer maybe disposed on a pixel to deteriorate a display quality.

A photoresist formed on the thin film transistor substrate or on thecolor filter substrate is etched to form the rigid substrate. Thus, therigid substrate may be formed in a region between the pixels, so thatthe display quality is not deteriorated. Further, the photoresist mayhave a thin thickness. Thus, the cell gap may be reduced.

However, when a different compression is applied depending on regions,the cell gap is different according to the regions.

For example, when the thin film transistor substrate is over the colorfilter substrate with reference to a gravitational force, the thin filmtransistor substrate sags due to an atmospheric pressure and aself-weight of the thin film transistor substrate.

FIG. 1 is a graph showing a relation between a cell gap and a positionof a thin film transistor substrate, when a general rigid spacer isused.

A point ‘A’ represents a position near a first edge of a thin filmtransistor substrate. A point ‘B’ represents a center position of thethin film transistor substrate. A point ‘C’ represents a position near asecond edge that is opposite to the first edge of the thin filmtransistor substrate.

Referring to FIG. 1, a cell gap at the center position ‘B’ of the thinfilm transistor is minimum, and the cell gap increases in a directionfrom the center position ‘B’ to the edge position ‘C’. That is, becausecompression is maximum at the center due to a self-weight of the thinfilm transistor substrate.

Thus, a rigid spacer formed at the center ‘B’ is compressed more than arigid spacer formed at the edges ‘A’ and ‘C’, so that the rigid spacerformed at the center ‘B’ or the center portion of the color filtersubstrate and the thin film transistor substrate may be damaged.

Recently, as a liquid crystal display apparatus becomes larger, a methodof filling the liquid crystal is changed from a vacuum injection methodinto a drop and filling method.

In the drop and filling method, liquid crystal material is dropped onthe color filter substrate having a spacer formed thereon. Then, thecolor filter substrate and the thin film transistor substrate areassembled with each other.

The drop and filling method is simple in comparison with the vacuuminjection method. However, a liquid crystal display apparatusmanufactured by the drop and filling method may include an unfilledregion where the liquid crystal is not completely filled, or the liquidcrystal material may overflow, when the liquid crystal material is toomuch.

In detail, when the liquid crystal material is provided too much, theliquid crystal material overflows, so that the thin film transistorsubstrate and the color filter substrate are not completely assembled.When the liquid crystal material is provided insufficiently, the liquidcrystal display apparatus includes the unfilled region.

The unfilled region deteriorates a display quality of the liquid crystaldisplay apparatus.

Due to these problems, a vacuum injection method is used in spite ofcomplexity of procedure and much consumption of liquid crystal material.

However, as the liquid crystal display apparatus becomes larger, thevacuum injection method meets a limit. Thus, the drop and filling methodhas been developed.

In the drop and filling method, the amount of the spacer and the liquidcrystal material is important.

SUMMARY OF THE INVENTION

Accordingly, the present invention is provided to substantially obviateone or more problems due to limitations and disadvantages of the relatedart.

It is a feature of the present invention to provide a substrate forliquid crystal display apparatus.

In one aspect of the present invention, a liquid crystal displayapparatus having the substrate is provided.

In another aspect of the present invention, a method of manufacturing aliquid crystal display apparatus is provided.

According to the substrate of this invention, the substrate includes atransparent substrate and a plurality of spacers. The transparentsubstrate includes a display region for displaying an image. The spacersare formed in the display region. The spacers have a graduallyincreasing compression ratio in a direction from a center of the displayregion to an edge of the display region.

The liquid crystal display apparatus includes a first substrate, asecond substrate, a fence, a liquid crystal layer and a plurality ofspacers. The first substrate includes a display region for displaying animage. The second substrate faces the first substrate. The fence isdisposed between the first substrate and the second substrate. The fencesurrounds the display region to form a space defined by the first andthe second substrates and the fence. The liquid crystal layer isdisposed in the space. The spacers are disposed in the space. Thespacers maintain the distance between the first and second substrates.The spacers have a gradually increasing compression ratio in a directionfrom a center of the display region to an edge of the display region.

According to the method of manufacturing the liquid crystal displayapparatus, a first substrate including a display region for displayingan image is formed. A second substrate is formed. A plurality of spacersis formed on the display region of the first substrate. The spacers havea gradually increasing compression ratio in a direction from a center ofthe display region to an edge of the display region. A fence is formedon the first substrate, such that the fence surrounds the display regionto form a space defined by the first substrate and the fence. Liquidcrystal is dropped in the space to fill the space. Then, the first andsecond substrates are assembled with each other.

According to another method of manufacturing the liquid crystal displayapparatus, a first substrate including a display region for displayingan image is formed. A second substrate is formed. A density and across-sectional area of spacers are calculated from a comparative liquidcrystal display panel. Then, the spacers according to the calculateddensity and the cross-sectional area are formed on the first substrate.A fence is formed on the first substrate, such that the fence surroundsthe display region to form a space defined by the first substrate andthe fence. Liquid crystal is dropped in the space to fill the space.Then, the first and second substrates are assembled with each other.

The liquid crystal display apparatus maintains a uniform cell gap, eventhough a compressive stress of a center portion of the liquid crystaldisplay apparatus is different from a compressive stress of an edgeportion of the liquid crystal display apparatus. Therefore, displayquality is enhanced.

According to the method of manufacturing a liquid crystal displayapparatus, the density and the cross-sectional area are adjusted, sothat an unfilled region where the liquid crystal is not filled is notformed. Thus, the display quality is also enhanced. Further, the firstand second substrates are not damaged while assembling the first andsecond substrates.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantage points of the presentinvention will become more apparent by describing in detailed exemplaryembodiments thereof with reference to the accompanying drawings, inwhich:

FIG. 1 is a graph showing a relation between a cell gap and a positionof a thin film transistor substrate, when a general rigid spacer isused;

FIG. 2 is a schematic plan view showing a mother substrate of liquidcrystal display panel according to a first exemplary embodiment;

FIG. 3 is a cross-sectional view taken along a line A-A′ of FIG. 2;

FIG. 4 is a cross-sectional view showing a liquid crystal displayapparatus according to a second exemplary embodiment;

FIG. 5 is a cross-sectional view showing a liquid crystal displayapparatus according to a third exemplary embodiment;

FIG. 6 is a graph showing a relation between a compressive stress and anamount of compression for different energy of exposure process isapplied;

FIG. 7 is a graph showing a relation between energy of exposure processand an amount of compression (or Young's modulus);

FIG. 8 is a layout showing a portion of a thin film transistor substrateof a liquid crystal display apparatus according to a fourth exemplaryembodiment of the present invention;

FIG. 9 is a cross-sectional view taken along a line B-B′ of FIG. 8;

FIG. 10 is a cross-sectional view showing a liquid crystal displayapparatus according to a fourth exemplary embodiment of the presentinvention;

FIG. 11 is a schematic view showing an arrangement of spacers accordingto a fifth exemplary embodiment of the present invention;

FIG. 12 is a cross-sectional view showing a liquid crystal displayapparatus according to a sixth exemplary embodiment of the presentinvention,

FIG. 13 is a schematic view showing a thin film transistor substrate ofFIG. 12;

FIG. 14 is a schematic view showing a color filter substrate of FIG. 12;

FIG. 15 is a cross-sectional view showing spacers formed on a colorfilter substrate of FIG. 12;

FIG. 16 is a graph showing a relation between amount of compression anda position;

FIGS. 17A to 17C are perspective views showing spacers formed in an edgeportion of a color filter substrate;

FIGS. 18A to 18C are perspective views showing spacers formed in acenter portion of a color filter substrate;

FIG. 19 is a schematic plan view showing spacers and fence formed on acolor filter substrate;

FIG. 20 is a cross-sectional view showing a process of manufacturing athin film transistor substrate of a liquid crystal display apparatusaccording to a sixth exemplary embodiment of the present invention;

FIG. 21 is a cross-sectional view showing a process of manufacturing acolor filter substrate of a liquid crystal display apparatus accordingto a sixth exemplary embodiment of the present invention;

FIG. 22 is a cross-sectional view showing a process of manufacturingspacers according to a sixth exemplary embodiment of the presentinvention;

FIG. 23 is a cross-sectional view showing a spacers formed on a colorfilter substrate according to a sixth exemplary embodiment of thepresent invention;

FIG. 24 is a cross-sectional view showing a liquid crystal filled in aspace formed by a fence and a color filter substrate cross-sectionalview showing a process of manufacturing spacers according to a sixthexemplary embodiment of the present invention;

FIG. 25 is a cross-sectional view showing a liquid crystal displayapparatus according to a seventh embodiment of the present invention;

FIG. 26 is a schematic plan view showing a color filter substrate of aliquid crystal display apparatus of FIG. 25;

FIG. 27 is a cross-sectional view taken along a line C-C′ of FIG. 26;

FIG. 28A is a graph showing a relation between a cell gap and astiffness factor, when a Young's modulus is about 487 N/mm²;

FIG. 28B is a graph showing a relation between a compression ratio and astiffness factor, when a Young's modulus is about 487 N/mm²;

FIG. 29A is a graph showing a relation between a cell gap (or acompression ratio) and a stiffness factor, when a Young's modulus isabout 243.5 N/mm²;

FIG. 29B is a graph showing a relation between a cell gap (or acompression ratio) and a stiffness factor, when a Young's modulus isabout 974 N/mm²;

FIG. 30 is a schematic plan view showing a thin film transistorsubstrate according to a seventh exemplary embodiment of the presentinvention;

FIG. 31A is a schematic cross-sectional view showing a chromium thinfilm formed on a transparent substrate;

FIG. 31B is a schematic cross-sectional view showing a process ofmanufacturing a photoresist pattern;

FIG. 31C is a plan view showing a pattern mask of FIG. 32B;

FIG. 31D is a schematic cross-sectional view showing a black matrixformed on a transparent substrate;

FIG. 31E is a schematic cross-sectional view showing a color filtersformed on a transparent substrate, a first electrode formed on the colorfilters;

FIG. 31F is a schematic cross-sectional view showing a process offorming spacers on a first electrode;

FIG. 31G is a plan view of a pattern mask of FIG. 31F;

FIG. 31H is a schematic cross-sectional view showing a process ofdropping liquid crystal;

FIG. 31I is a cross-sectional view showing a thin film transistor and acolor filter substrates assembled with each other to form a liquidcrystal display panel; and

FIG. 31J is a cross-sectional view showing a liquid crystal displaypanel having spacers of which on end is tapered.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter the preferred embodiments of the present invention will bedescribed in detail with reference to the accompanying drawings.

Embodiment 1

FIG. 2 is a schematic plan view showing a mother substrate of liquidcrystal display panel according to a first exemplary embodiment, andFIG. 3 is a cross-sectional view taken along a line A-A′ of FIG. 2.

Referring to FIGS. 2 and 3, a mother substrate 110 of a liquid crystaldisplay panel includes a plurality of liquid crystal display panels 101,102, 103 and 104.

The mother substrate 110 includes two substrates 120 and 130, and aliquid crystal layer interposed between the two substrates 120 and 130.Each of the liquid crystal display panels 101, 102, 103 and 104 includesa display region.

A plurality of spacers 150 is formed between the two substrates 110 and120. The spacers 150 maintain a cell gap that is a distance between thetwo substrates 110 and 120.

The liquid crystal layer 140 is confined within a space defined by thetwo substrates 110 and 120, and a fence 160.

As shown in FIG. 3, the spaces 150 have different tapered angles θ1, θ2and θ3 from each other.

The tapered angle θ3 of a spacer 150 disposed at a center portion is theleast. The tapered angle of the spaces 150 increases in a direction fromthe center portion to an edge portion of each of the liquid crystaldisplay panels 101, 102, 103 and 104.

A compression ratio of the spacers 150 is inversely proportional to avalue that is obtained by multiplying an upper diameter by a lowerdiameter of the spacer 150. Thus, the value obtained by multiplying theupper diameter by the lower diameter of the spacer 150 that is disposedat the center is larger than that of the spacer 150 that is disposed atthe edge of the liquid crystal display panel, so that the compressionratio of the spacers 150 becomes larger in a direction from the centerto the edge.

Thus, the cell gap of the center is substantially equal to the cell gapof the edge, even though the compression at the center is large due tothe self-weight.

The fence 160 may be used as a spacer 150 that maintains the cell gapbetween the two substrates 120 and 130.

Embodiment 2

FIG. 4 is a cross-sectional view showing a liquid crystal displayapparatus according to a second exemplary embodiment.

The liquid crystal display apparatus of the present embodiment issimilar to the liquid crystal display apparatus of Embodiment exceptthat a shape of the spaces is different from that of Embodiment 1. Thus,in FIG. 4, the same reference numbers will be used to refer to the sameor like parts as those shown in FIG. 3.

Referring to FIGS. 2 and 4, spacers 170 support the two substrates 120and 130. A diameter of the spacers 170 becomes smaller in a directionfrom the center to the edge, so that a compression ratio becomes largerin the direction.

In other word, an area of a contact face between the spacers 170 and thetwo substrates 120 and 130 becomes smaller in a direction from thecenter to the edge.

Thus, the cell gap of the center is substantially equal to the cell gapof the edge, even though the compression at the center is large due tothe self-weight.

In FIG. 4, tapered angles of the spacers 170 are the same. However, thetapered angles may be different from each other.

Referring again to FIGS. 3 and 4, a compressed amount δ of the spacers150 or 170 is inversely proportional to a value that is obtained bymultiplying an upper diameter D1 by a lower diameter D2 of the spacer150 or 170, as shown in the following Expression 1.

$\begin{matrix}\begin{matrix}{\delta = {{\int_{0}^{L_{0}}{ɛ_{L}d\; L}} = {\frac{4P}{\pi\; E}{\int_{0}^{L_{0}}{\frac{1}{\left( {D_{1} + {2L\;\tan\;\theta}} \right)^{2}}\ {\mathbb{d}L}}}}}} \\{= {\frac{4P}{\pi\; E}\left\lbrack {- {\frac{1}{\left( {2\;\tan\;\theta} \right)} \times \frac{1}{\left( {D_{1} + {2L\;\tan\;\theta}} \right)}}} \right\rbrack}_{0}^{L_{0}}} \\{= {\frac{2P}{\pi\; E\;\tan\;\theta}\left\lbrack {\frac{1}{D_{1}} - \frac{1}{\left( {D_{1} + {2L_{0}\tan\;\theta}} \right)}} \right\rbrack}} \\{= {\frac{4\; P}{\pi\; E}\frac{L_{0}}{D_{1}\left( {D_{1} + {2L\;\tan\;\theta}} \right)}}} \\{{{\therefore\delta} = \frac{4{PL}_{0}}{\pi\;{ED}_{1}D_{2}}},\left( {{\tan\;\theta} = \frac{D_{2} - D_{1}}{2\; L_{0}}} \right)}\end{matrix} & {{Expression}\mspace{14mu} 1}\end{matrix}$

wherein ‘P’ denotes a compressive stress, ‘L₀’ denotes a length (orheight) of the spacer 150 or 170, and ‘E’ denotes Young's modulus.

The compressed amount δ_(edge) of the spacers disposed at the edge islarger than the compressed amount δ_(center) of the spacers disposed atthe center so as to maintain a uniform cell gap(δ_(edge)<δ_(center)+0.1).

The compressed amount δ_(center) is larger than compressed amountδ_(edge) by about 0.1 μm. Thus, when δ_(edge) is smaller thanδ_(center)+0.1 (δ_(edge)<δ_(center)+0.1), the cell gap is maintaineduniformly.

Thus, the following Expression 2 is induced.1<(D _(center1) ×D _(center2))/(D _(edge1) ×D _(edge2))<1+0.1(D_(center1) ×D _(center2)),  Expression 2

wherein D_(center1) and D_(center2) represent respectively upper andlower diameters of the spacer of the center, and D_(edge1)×D_(edge2)represent respectively upper and lower diameters of the spacer of theedge.

The multiplication of the diameters is directly proportional to the areaof a contact face between the spacers 150 or 170 and the two substrates120 or 130. Thus, the Expression 3 may be induced from the Expression 2.1<A _(center) /A _(edge)<1+0.1A _(center),  Expression 3

wherein A_(center) denotes an area of contact face between thesubstrates and the spacer 150 or 170 disposed at the center, andA_(edge) denotes an area of contact face between the substrates and thespacer 150 or 170 disposed at the edge.

Thus, when a spacer satisfies Expression 2 or Expression 3, the cell gapis maintained uniformly, even though different compressive stress may beapplied depending the region.

Embodiment 3

FIG. 5 is a cross-sectional view showing a liquid crystal displayapparatus according to a third exemplary embodiment.

Referring to FIG. 5, each of spacers 180 has a same shape. However, acompression ratio of the spacers 180 is different from each other.

The spacers 180 have different polymer linking density. That is, thepolymer linking density of the spacer 180 disposed at the center of theliquid crystal display panel is higher than that of the spacer 180disposed at the edge.

The polymer linking density of the spacer 180 becomes higher in adirection from the center to the edge of the liquid crystal panel.

In order to adjust the polymer linking density of the spacer 180, energyof exposure process is modulated. The spacers 180 are formed through aphotolithography process. That is, a photoresist is coated on a firstsubstrate 120 or on a second substrate 130. Then, the photoresist isexposed with a mask disposed over the photoresist, and developed, sothat the spacers 180 are formed. As the photoresist is exposed to alight having higher energy, the polymer linking density of the spacer180 becomes higher. Thus, energy of the light becomes lower in adirection from the center to the edge, so that the polymer linkingdensity of the spacers 180 becomes lower in the direction.

The spacer 180 disposed at the edge is more compressive than the spacer180 disposed at the center, so that the uniform cell gap is maintained,even though a compressive force of the center is stronger than that ofthe edge due to the self-weight.

FIG. 6 is a graph showing a relation between a compressive stress and anamount of compression for different energy of exposure process isapplied.

In a simulation, a cylindrical shaped spacer has a height of about 4.5μm and a diameter of about 2.5 μm.

As shown in the FIG. 6, as the compressive stress increases, an amountof compression increases. As energy of exposure process increases, theamount of compression decreases. That is, when the energy of exposureprocess increases, the spacers become stiffer.

The graph of compressive stress and the amount of compression is ahysteresis curve.

When the energy of exposure process is about 100 mJ, the amount ofcompression that corresponds to 5 gf compressive stress is about 0.746μm. When the energy of exposure process is about 300 mJ, the amount ofcompression that corresponds to 5 gf compressive stress is about 0.62μm. A difference in the amount of compression is about 0.13 μm. Theenergy difference of light of the center and the edge does not exceedabout 200 mJ.

FIG. 7 is a graph showing a relation between energy of exposure processand an amount of compression (or Young's modulus).

Young's modulus is a compressive stress per a cross-sectional area ofthe spacer. Various elements change Young's modulus. In FIG. 7, theenergy of exposure process is the element that changes Young's modulus.

As shown in FIG. 7, as the energy of exposure process becomes larger,Young's modulus becomes larger and the amount of compression becomessmaller.

Thus, in order to maintain a uniform cell gap, forming a spacer of thecenter needs light that has much energy than that of the edge.

Preferably, Young's modulus between the spacer of the center and thespacer of the edge does not exceed about 100 N/mm².

Referring again to FIGS. 2 and 5, a liquid crystal layer 140 may beformed before or after separating the liquid crystal panels 101, 102,103 and 104 from the mother substrate 110.

Liquid crystal material may be injected between the first substrate 120and the second substrate 130 via vacuum injection, after the liquidcrystal panels 101, 102, 103 and 104 are separated from the mothersubstrate 110 according to dotted lines ‘a’ and ‘b’.

The liquid crystal material may be dropped on the first substrate 120 orthe second substrate 130, and the first and second substrates 120 and130 are assembled, before the liquid crystal panels 101, 102, 103 and104 are separated from the mother substrate 110.

The first substrate 120 corresponds to an array substrate (or thin filmtransistor substrate). The second substrate 130 corresponds to a colorfilter substrate.

The array substrate includes a gate line, a date line, a thin filmtransistor and a pixel electrode. The thin film transistor includes agate electrode, a drain electrode and a source electrode. The gateelectrode is electrically connected with the gate line. The sourceelectrode is electrically connected with the data line. The drainelectrode is electrically connected with the pixel electrode.

A scan signal is transferred to the gate electrode of the thin filmtransistor via the gate line. An image signal is transferred to thedrain electrode via the data electrode. The image signal is applied tothe pixel electrode.

The color filter substrate includes a common electrode and colorfilters. The color filters include a red-color filter, a green colorfilter and blue-color filter.

The color filter and the common electrode may be formed on the arraysubstrate.

Embodiment 4

FIG. 8 is a layout showing a portion of a thin film transistor substrateof a liquid crystal display apparatus according to a fourth exemplaryembodiment of the present invention, and FIG. 9 is a cross-sectionalview taken along a line B-B′ of FIG. 8.

Referring to FIGS. 8 and 9, a gate wiring and a storing line 220 areformed on a first transparent substrate 120. The gate wiring includes aconducting layer that has a high electric conductivity. The gate line237 and the storing line 220 are tapered.

The gate wiring includes a gate line 230, a gate pad (or end of the gateline) 235 and the gate electrode 237. The gate line 230 is elongated ina first direction. The gate pad 235 is formed at an end portion of thegate line 230. The gate electrode 237 protrudes from the gate line 230.

A protrusion of the gate line 230 that overlaps with a pixel electrode240 may used as one conductor of an electric condenser so as to storeelectric charges, so that the storing line 220 may not be formed. Incase of a shortage of an electric capacitance, a wiring for storingelectric charges may be equipped separately.

A gate insulation layer 250 comprising silicon nitride (SiNx) is formedon the first transparent substrate 120 to cover the storing line 220 andthe gate pad 235.

A semiconductor layer 260, such as an amorphous silicon layer is formedon a portion of the gate insulation layer 250, such that thesemiconductor layer 260 is disposed over the gate electrode 237.

A contact resistance layers 273 and 276 comprising an amorphous siliconlayer having n-type dopants or silicide (n+a-SiNx:H) are formed on thesemiconductor layer 260.

The data wiring comprising high electric conductive material is formedon the contact resistance layer 273 and 276. The data wiring iselongated in a second direction that is substantially perpendicular tothe first direction. The data wiring includes a data line 280, a sourceelectrode 283, a data pad 287 and a drain electrode 286. A pixel isdefined by one data line 280 and one gate line 230. The data pad 287 isformed at one end of the data wiring. An image signal is applied to thedata pad 287 via the data pad 287. The drain electrode 286 is spacedapart from the source electrode 283. The data wiring overlaps with thestoring line 220 so as to enhance an electric capacitance. The datawiring may be one conductor of a capacitor for maintaining electriccharges. The capacitor is electrically connected with a pixel electrode240. The data wiring does not cover the semiconductor layer 260.

A protection layer 290 is formed on the data wiring and thesemiconductor layer 260. The protection layer 290 may be easily leveled.The protection layer 290 comprises an organic material or a materialthat has a low dielectric constant, such as a-Si:C:O:H.

The protection layer 290 may further include an insulation layercomprising silicon nitride. Preferably, when the protection layer 290includes the insulation layer, the protection layer 290 is disposedunder the organic material, such that the insulation layer makes contactwith the semiconductor layer 260.

A portion of the organic material is not disposed on the gate pad 235and the data pad 287 so as to be electrically connected to externaldevice for driving the gate driving circuit and the data driving circuitor to a circuit mounted on the first transparent substrate 120.

The protection layer 290 includes contact holes 302 and 305. The contactholes 302 and 305 expose the drain electrode 286 and the data pad 287respectively. A contact hole 307 exposes the gate insulation layer 250and the gate pad 235.

The pixel electrode 240 is formed on the protection layer 290. The pixelelectrode 240 is disposed in the display region. The pixel electrode 240is electrically connected with the drain electrode 286 via the contacthole 302. The pixel electrode 240 comprises indium tin oxide (ITO) orindium zinc oxide (IZO). The indium tin oxide and the indium zinc oxideare electrically conductive and transparent.

A sub gate pad 312 and a sub data pad 317 are electrically connectedwith the gate pad 235 and the data pad 287 via the contact holes 302 and305, respectively. The sub gate pad 312 and the sub data pad 317 are notessential. The sub gate pad 312 and the sub data pad 317 protect thegate pad 235 and the data pad 287 respectively.

A black matrix 420 is formed on a second transparent substrate 410 ofthe color filter substrate 400 that faces the array substrate 100. Acolor filter 430 is formed on the second transparent substrate 410. Thecolor filter 430 faces the pixel electrode 240 of the array substrate100. The color filter 430 includes a red-color filter, a green-colorfilter and a blue color filter. A common electrode 440 is formed on thecolor filter 430 and the black matrix 420 to cover them.

A liquid crystal layer 500 and spacers 150 are interposed between thearray substrate 100 and the color filter substrate 400. The spacers 150maintain a cell gap (or a distance between the array substrate 100 andthe color filter substrate 400).

The spacers 150 may be one of the spacer disclosed in the aboveembodiments and combinations of the embodiments.

Liquid crystal molecules of the liquid crystal layer 500 have positivedielectric constant anisotropy. When the liquid crystal display panelcorresponds to twisted nematic mode, the liquid crystal molecules aretwisted to form a helical shape. When the liquid crystal display panelcorresponds to vertical alignment mode, the liquid crystal molecules areerected with reference to the array substrate 100 and the color filtersubstrate 400. When the liquid crystal display panel corresponds tooptically compensated birefringence mode, the liquid crystal moleculessymmetrically arranged with reference to a center of the array substrate100.

FIG. 10 is a cross-sectional view showing a liquid crystal displayapparatus according to a fourth exemplary embodiment of the presentinvention.

In FIG. 9, the spacers 150 are formed on the array substrate 100.However, the spacers 150 may be formed on the color filter substrate 400as shown in FIG. 10.

Referring to FIG. 10, the spacers 150 are disposed over the black matrix420 that faces the gate line 230 or the thin film transistor, so thatthe black matrix 420 conceals the spacers 150.

FIG. 11 is a schematic view showing an arrangement of spacers accordingto a fifth exemplary embodiment of the present invention.

Referring to FIG. 11, the spacers 150 are spaced apart from each other.The spacers 150 are disposed between color filters including a red colorfilter R, a green color filter G and a blue color filter.

Embodiment 5

Hereinafter, a method of manufacturing a liquid crystal display panelaccording to a fifth embodiment of the present invention is explained.

Referring to FIGS. 1 through 11, the gate wiring, the data wiring, thethin film transistor and the pixel electrode are formed on the arraysubstrate 100 of the liquid crystal display panel 110. An organicmaterial is coated and patterned to form the spacers 150. The spacers150 may have different tapered angle, different contact area, ordifferent polymer linking density.

The red, green and blue color filters 430 and the common electrode 440are formed on the second transparent substrate 410. The color filters430 and the common electrode 440 may be formed on a same substrate withthe thin film transistor.

The array substrate 100 that includes spacers 150 formed thereon islarger than the color filter substrate 400 by about 10%-30%.

The spacers 150 may be formed on the color filter substrate 400.

When the spacers 150 are formed via a photolithography process, thespacers may be arranged in a specific position, and the distance betweenthe spacers 150 is uniform.

Further, the spacers 150 may be formed to have short height, so that thecell gap may be small. Further, the spacers 150 are not formed on thepixel electrode to enhance the display quality.

A fence 160 is formed on the array substrate 100 or the color filtersubstrate 200 having the spacers 150 formed thereon. The fence 160 is aclosed curve that has no opening for liquid crystal material injection.The fence 160 may be hardened, when ultraviolet rays are irradiated orheated. The fence 160 may include a spacer that maintains the cell gap.

The fence 160 does not include the opening for liquid crystal materialinjection, so that adjusting an amount of the liquid crystal material isimportant. The fence 160 may include a buffer region for overflowingliquid crystal material. The fence 160 may include a protection filmthat prevents a reaction between the fence 160 and the liquid crystalmaterial. The protection film is formed on a portion of the fence 160,where the liquid crystal material makes contact with the fence 160.

The liquid crystal material is dropped on the array substrate 100 or onthe color filter substrate 200 including the fence 160 formed thereon.The liquid crystal material may be injected by a syringe or sprayed by asprayer.

Then, the array substrate 100 and the color filter substrate 400 aretransferred to a vacuum chamber of an assembler. The array substrate 100and the color filter substrate 400 are compressed. Then, ultravioletrays are irradiated on the fence 160 to harden the fence 160. Thus, theliquid crystal display panel 110 is completed. While irradiating theultraviolet rays, an alignment of the array substrate 100 and the colorfilter substrate 400 is adjusted minutely. The fence 160 has a littleflexibility. Although the fence 160 and a spacer 150 mixed with thefence 160 support an edge portion of the array substrate 100 and thecolor filter substrate 400, the spacers 150 support the center portionof the array substrate 100 and the color filter substrate 400. Thespacers 150 are more flexible than the fence 160.

The spacers 150 may be tapered, such that a tapered angle of the spacers150 becomes larger in a direction from a center of the liquid crystaldisplay panel 101 to an edge of the liquid crystal display panel 101.However, a difference of the tapered angle between the spacer 150 of theedge and the spacer 150 of the center is less than about 40°.

A diameter of the spacers 150 may become smaller in a direction from thecenter to the edge.

A polymer linking density of the spacers 150 may become higher in adirection from the center to the edge. Preferably, Young's modulusbetween the spacer of the center and the spacer of the edge does notexceed about 100 N/mm².

Thus, a uniform cell gap may be maintained between the center portion ofthe liquid crystal display panel 101 and the edge portion of the liquidcrystal display panel 101.

Then, each of the liquid crystal display panels 101, 102, 103 and 104 isseparated from the mother substrate 110.

Embodiment 6

FIG. 12 is a cross-sectional view showing a liquid crystal displayapparatus according to a sixth exemplary embodiment of the presentinvention.

Referring to FIG. 12, a liquid crystal display apparatus 600 includes afirst substrate 700, a second substrate 800, a liquid crystal 900 andspacers 1000.

FIG. 13 is a schematic view showing a thin film transistor substrate ofFIG. 12.

Referring to FIG. 13, the first substrate 700 includes a firsttransparent substrate 710, pixel electrodes 720, a thin film transistor730, a gate line 740 and a data line 750.

A glass substrate that has high transmissivity may be used as the firsttransparent substrate 710.

The pixel electrodes 720 are formed on the first transparent substrate710, such that the pixel electrodes 720 are arranged in a matrix shape.For example, an area of each of the pixel electrodes 720 of 17 inchliquid crystal display panel is about 88 μm×264 μm.

When a gate signal is applied to the thin film transistor 730 via thegate line 740, the thin film transistor is turned on. Then, a pixelvoltage corresponding to an image is applied to each of the pixelelectrodes 720.

The thin film transistor 730 includes a gate electrode 731, a sourceelectrode 733, a drain electrode and a channel layer 736.

The gate electrode 731 is formed on the first transparent substrate 710.The gate electrode 731 is electrically insulated from the channel layer736.

The drain electrode 736 and the source electrode 733 are spaced apart,so that the drain electrode 736 and the source electrode 733 areelectrically insulated from each other. The drain electrode 736 and thesource electrode 733 are formed on the channel layer 736.

The gate line 740 is electrically connected with the gate electrode 731to form a channel in the channel layer 736 of the thin film transistor730.

A threshold voltage Vth for forming the channel is applied to the gateline 740.

The data line 750 is electrically connected with source electrode 733 ofthe thin film transistor 730. The drain electrode 735 is electricallyconnected with the pixel electrode 720. Thus, when the thin filmtransistor 730 is turned on, the data line 750 is electrically connectedwith the pixel electrode 720.

FIG. 14 is a schematic view showing a color filter substrate of FIG. 12.

Referring to FIG. 14, the second substrate 800 includes a secondtransparent substrate 810, a color filter 820 and a common electrode830. The second substrate 800 faces the first substrate 700 of FIG. 13.

A glass substrate that has high transmissivity may be used as the secondtransparent substrate 810. The color filter 820 may be formed on thesecond transparent substrate 810.

The color filter 820 includes a red-color filter 822, a green-colorfilter 824 and a blue color filter 826. A light having a wavelength thatcorresponds to red-color passes through the red-color filter 822. Alight having a wavelength that corresponds to green-color passes throughthe green-color filter 824. A light having a wavelength that correspondsto blue-color passes through the blue-color filter 826.

The common electrode 830 is coated on the second transparent substrate810 to cover the color filter 820. The common electrode 830 faces thepixel electrode 720 of the first substrate 700.

The first and second substrates 700 and 800 are assembled with eachother, when the liquid crystal 900 is injected.

When the cell gap is uniform, the liquid crystal display apparatus 600displays a high quality image.

The spacers 1000 are interposed between the first and second substrates700 and 800, so that the spacers 1000 maintain the cell gap.

The spacers 1000 correspond to a rigid spacer. A photoresist are coatedand patterned, so that the rigid spacer is formed.

FIG. 15 is a cross-sectional view showing spacers formed on a colorfilter substrate of FIG. 12.

Referring to FIGS. 12 and 15, spacers 1000 are formed over the secondsubstrate 800. In FIG. 15, only three spacers 1000 are illustrated forexample, about 1,000,000 numbers of spacers are formed over the secondsubstrate 800 for 17 inch liquid crystal display apparatus 600. Thespacers 1000 are arranged in a matrix shape.

The spacers 1000 are formed over the second substrate 800, such that thespacers 1000 are disposed between the pixel electrodes 720, when thefirst and second substrates 700 and 800 are assembled with each other.Thus, the spacers 1000 do not deteriorate the display quality.

The spacer 1000 has a column shape having a first contact face 1020 anda second contact face 1010. The first contact face 1020 makes contactwith the first substrate 700. The second contact face 1010 makes contactwith the second substrate 800.

The spaces 1000 are compressed, when an external compressive stress isapplied to the spacers 1000. Thus, the cell gap is reduced when theexternal compressive stress is applied to the liquid crystal displayapparatus 600.

The external compressive stress corresponds to an atmospheric pressureand a pressure caused by self-weight.

FIG. 16 is a graph showing a relation between amount of compression anda position.

Generally, when the second substrate 800 is disposed over the firstsubstrate 700, the compressive stress caused by the atmospheric pressureis equally applied to overall area of the second substrate 800, as shownin graph ‘B’.

The compressive stress caused by the self-weight is maximal at thecenter ‘E’ of the second substrate 800. The compressive stress caused bythe self-weight is minimal at the edges ‘D’ and ‘F’ of the secondsubstrate 800.

The compressive stress becomes smaller in a direction from the center‘E’ to the edges ‘D’ and ‘F’, as shown in graph ‘A’.

Thus, a total compressive stress becomes smaller in the direction fromthe center ‘E’ to the edges ‘D’ and ‘F’.

When same spacers are formed at the center portion and the edge portion,the center portion of the second substrate 800 sags to form a U-shape.Thus, the cell gap of the center is smaller than that of the edge. Thatinduces a deterioration of the display quality.

The spacers may be formed, such that the spacer disposed at the centerportion has a larger diameter than the spacer disposed at the edgeportion.

In case a distance between the pixel electrodes is too small, adjustingthe diameter of the spacer meets a limitation.

Thus, a shape of the spacers may be adjusted so as to maintain theuniform cell gap, while not changing the diameter of the spacer.

Referring again to FIG. 15, the spacer 1000 disposed at the centerportion ‘E’ has different shape from the spacer 1000 disposed at theedge portions ‘D’ and ‘F’.

For example, the first contact face 1020 of the spacers 1000 disposed atthe edge portions ‘D’ and ‘F’ is smaller than the first contact face1020 of the spacers 1000 disposed at the center portion ‘E’. However,the second contact face 1010 of the spacers 1000 disposed at the edgeportions ‘D’ and ‘F’ is substantially equal to the first contact face1020 of the spacers 1000 disposed at the center portion ‘E’.

An area of the first contact face 1020 may be easily calculated from anexternal compressive stress, Young's modulus and the height of thespacers 1000.

The area of the first contact face 1020 of the spacers graduallydecreases in the direction from the center portion ‘E’ of the secondsubstrate 800 to the edge portion ‘D’ and ‘F’ of the second substrate800. Thus, even though the compressive stress becomes weaker in thedirection from the center portion ‘E’ to the edge portion ‘D’, the cellgap is maintained uniformly.

FIGS. 17A to 17C are perspective views showing spacers formed in an edgeportion of a color filter substrate.

Referring to FIGS. 17A-17C, spacers formed in an edge portion may have atruncated cone shape, a frustum of rectangular pyramid shape, a frustumof hexagonal pyramid shape etc., so that the first contact face 1020 issmaller than the second contact face 1010.

FIGS. 18A to 18C are perspective views showing spacers formed in acenter portion of a color filter substrate.

Referring to FIGS. 15 and 18A to 18C, the spacers formed in a centerportion of the second substrate 800 may have a cylindrical shape, arectangular prism shape, a hexagonal prism shape. etc. Thus, the area ofthe first contact face 1020 is maximum at the center of the secondsubstrate 800. The area of the first contact face 1020 is substantiallyequal to the area of the second contact face 1010.

A ratio of the first contact face 1020 to the second contact face 1010(the first contact face 1020/the second contact face 1010) of thespacers formed at the second substrate 800 may gradually decreaseaccording to the compressive stress applied to the second substrate 800due to the self-weight.

Thus, the cell gap of the first and second substrate 700 and 800 ismaintained uniformly.

FIG. 19 is a schematic plan view showing spacers and fence formed on acolor filter substrate.

Referring to FIG. 19, a fence 850 is formed on an edge portion of thesecond substrate 800, after the spacers 1000 are formed on the secondsubstrate 800.

The fence 850 comprises a mater that is hardened, when ultraviolet raysare irradiated onto the mater. Thus, the fence 850 is hardened, when theultraviolet rays are irradiated onto the fence 850. The fence 850 has aclosed curve shape, so that the fence 850 and the second substrate 800form a space for receiving the liquid crystal 900.

Referring again to FIG. 12, the liquid crystal 900 is dropped in thespace.

When the liquid crystal 900 is filled, the second substrate 800 isassembled with the first substrate 700. Then, the ultraviolet rays areirradiated onto the fence 850 to harden the fence 850, so that the firstand second substrates 700 and 800 are assembled tightly with each other.

Hereinafter, a method of manufacturing the first substrate 700 of theliquid crystal display apparatus is explained.

FIG. 20 is a cross-sectional view showing a process of manufacturing athin film transistor substrate of a liquid crystal display apparatusaccording to a sixth exemplary embodiment of the present invention.

Referring to FIG. 20, thin film transistors 730 are formed on the firsttransparent substrate 710. Each of the thin film transistors 730includes a gate electrode 731, a source electrode 733, a drain electrode735 and a channel layer 736.

The thin film transistors 730 are arranged in a matrix shape on thefirst transparent substrate 710.

A pixel electrode 720 is electrically connected to the drain electrode735. The pixel electrode 720 comprises an indium tin oxide (ITO) orindium zinc oxide (IZO). The indium tin oxide (ITO) or indium zinc oxide(IZO) is transparent and electrically conductive.

FIG. 21 is a cross-sectional view showing a process of manufacturing acolor filter substrate of a liquid crystal display apparatus accordingto a sixth exemplary embodiment of the present invention.

Referring to FIG. 21, a red color filter 822, a green color filter 824and a blue color filter 826 is arranged alternatively. The color filtersare arranged in a matrix shape.

A common electrode 830 is formed on the color filters. The commonelectrode 830 comprises the indium tin oxide (ITO) or indium zinc oxide(IZO).

FIG. 22 is a cross-sectional view showing a process of manufacturingspacers according to a sixth exemplary embodiment of the presentinvention.

Referring to FIG. 22, a photoresist material is coated on the commonelectrode 830 to form a photoresist thin film 840. A spin coating methodmay be used, when coating the photoresist thin film on the commonelectrode 830.

The photoresist thin film 840 is firstly cured via soft baking.

Then, a pattern mask is aligned over the photoresist thin film 840. Thepattern mask includes a pattern that corresponds to a spacer. Thephotoresist thin film 840 is exposed and developed, so that the spaceris formed.

FIG. 23 is a cross-sectional view showing spacers formed on a colorfilter substrate according to a sixth exemplary embodiment of thepresent invention.

Spacers 1000 are spaced apart from each other. The spacers 1000 aredisposed, such that the spacers 1000 are disposed between pixelelectrodes 720, when first and second substrates are assembled together.

The pattern of the pattern mask of FIG. 22 is different from each other,so that shapes of the spacers 1000 are different from each other. Thepattern mask is adjusted to form the spaces as shown in FIG. 23.

Each of the spacers 1000 has first and second contact faces 1020 and1010. The shapes of the spacers 1000 are modulated in a direction from acenter of the second transparent substrate 810 to an edge of the secondtransparent substrate 810.

In detail, an area of the first face 1020 of the spacers graduallydecreases in a direction from the center of the second transparentsubstrate 810 to the edge of the second transparent substrate 810, whilean area of the second face 1010 is maintained.

The spacers 1000 disposed on the edge portion of the second transparentsubstrate 810 may have a circular truncated cone shape, a frustum ofrectangular pyramid shape, a frustum of hexagonal pyramid shape, etc.,as shown in FIGS. 17A to 17C.

An area of the first and second contact faces 1020 and 1020 of a spacer1099 disposed at the center of the second transparent substrate 810 isthe same.

The spacer 1099 disposed at the center of the second transparentsubstrate 810 may have a cylindrical shape, a rectangular prism shape, ahexagonal prism shape, etc., as shown in FIGS. 18A to 18C.

FIG. 24 is a cross-sectional view showing a liquid crystal filled in aspace formed by a fence and a color filter substrate cross-sectionalview showing a process of manufacturing spacers according to a sixthexemplary embodiment of the present invention.

Referring to FIG. 24, when spacers 1000 are formed on the secondsubstrate 800, a fence 850 may be formed on a first substrate 700 or thesecond substrate 800.

Then, liquid crystal 900 is dropped and filled in a space defined by thefence 850.

For example, the fence 850 is formed on the second substrate 800.

Referring again to FIG. 12, when the liquid crystal 900 is filled in thespace defined by the fence 850, the first substrate 700 is assembledwith the second substrate 800 to form the liquid crystal displayapparatus. The cell gap or the distance between the first substrate 700and the second substrate 800 is less than about 0.15 μm.

Embodiment 7

FIG. 25 is a cross-sectional view showing a liquid crystal displayapparatus according to a seventh embodiment of the present invention.

Referring to FIG. 25, a liquid crystal display apparatus 1500 includes afirst substrate 1000, a second substrate 1400, spacers 1200 and a liquidcrystal layer 1300.

The spacers 1200 and the liquid crystal layer 1300 are disposed betweenthe first substrate 1000 and the second substrate 1400. The spacers 1200maintain the cell gap (or the distance between the first substrate 1000and the second substrate 1400).

FIG. 26 is a schematic plan view showing a color filter substrate of aliquid crystal display apparatus of FIG. 25.

Referring to FIGS. 25 and 26, the first substrate 1000 includes atransparent substrate 1110, a black matrix 1120, a color filter 1130, afirst electrode (or a common electrode) and a sealing wall (or fence)1150.

The transparent substrate 1110 supports the black matrix 1120, a colorfilter 1130 and a first electrode 1140.

The black matrix 1120 comprises Chromium (Cr) or Chromium oxide (CrO₂).

Chromium (Cr) or Chromium oxide (CrO₂) are coated on the transparentsubstrate 1110 and patterned to form the black matrix 1120. The blackmatrix 1120 has a lattice-shape.

The black matrix 1120 prevents a light from leaking via a portiondisposed between color filters 1130.

The color filters 1130 are enwrapped with the black matrix 1120. Thecolor filters 1130 includes a red color filter 1132, a green colorfilter 1134 and a blue color filter 1136. The red color filter 1132filters a white light, so that only a light that has a wavelengthcorresponding to the red color may pass through the red color filter1132.

The green color filter 1134 filters a white light, so that only a lightthat has a wavelength corresponding to the green color may pass throughthe green color filter 1134.

The blue color filter 1136 filters a white light, so that only a lightthat has a wavelength corresponding to the blue color may pass throughthe blue color filter 1136.

An edge of the color filters 1130 overlaps with the black matrix 1120,such that the edge of the color filters 1130 is disposed on the blackmatrix 1120.

The first electrode 1140 is formed on the color filters 1130, such thatthe first electrode 1140 covers the whole region of the transparentsubstrate 1110.

A reference voltage is applied to the first electrode 1140.

FIG. 27 is a cross-sectional view taken along a line C-C′ of FIG. 26.

Referring to FIGS. 26 and 27, spacers 1200 are formed to have a firstheight H1. The spacers 1200 are disposed over the black matrix 1120.

The spacers 1200 may have a cylindrical shape, so that the spacers 1200have a cylindrical surface, a first contact face 1210 and a secondcontact face 1220. The first contact face 1210 is parallel to the secondcontact face 1220.

The spacers 1200 make contact with the first electrode 1140 via thefirst contact face 1210.

The first height H1 of the spacers 1200 is larger than an allowableliquid crystal cell gap H2.

When the first height H1 is smaller than the allowable liquid crystalcell gap H2, the spacers 1200 may not maintain the distance between thefirst and second substrate 1100 and 1400.

When the first and second substrate 1100 and 1400 are assembled witheach other, the spacers 1200 are compressed to have height that issubstantially equal to H2.

An amount of compression of the spacers 1200 is determined by a factorsuch as a cross-sectional area of the spacers 1200, a count (or number)of the spacers 1200 and Young's modulus.

When Young's modulus is constant, the cross-sectional area and the countof spacers 1200 determine the amount of compression.

Firstly, the spacers 1200 are formed on the first electrode 1140disposed on the black matrix 1120, such that the spacers 1200 one-to-onecorrespond to the color filter 1130 so as to determine to thecross-sectional area of the spacers 1200.

When the cross-sectional area is determined, the counter of the spacersmay be adjusted according to the cross-sectional area.

In case that the cross-sectional area of the spacers 1200 is too small,the spacers 1200 are compressed so much that the spacers 1200 applystrong force to the first substrate 1100, so that the first electrode1140, the spacers 1200 or the black matrix 1120 may be broken.

In case that the cross-sectional area of the spacers 1200 is to large,the spacers 1200 are compressed so little that the spacers 1200 are notcompressed to the allowable liquid crystal cell gap H2. Thus, unfilledregion is formed, which is not preferable. The unfilled region induces acritical deterioration of display quality.

Thus, determining the cross-sectional area and density of the spacers1200 is important.

Hereinafter, a method of determining the cross-sectional area anddensity of the spacers 1200 is explained.

The cross-sectional area of the spacers 1200 is obtained by computersimulation. In order to obtain the cross-sectional area of the spacers1200, a comparative liquid crystal display panel is used.

For example, the comparative liquid crystal display panel is a 17 inchsuper extended graphics array (SXGA) liquid crystal display panel. Asize of a color filter of the comparative liquid crystal display panelis about 88 μm×264 μm. The size of a pixel is substantially equal to thesize of the color filter. A width of the black matrix of the comparativeliquid crystal display panel is in a range from about 12 μm to about 32μm, so that the color filters are spaced apart from each other by about12 μm-32 μm. In the comparative liquid crystal display panel, one spacerper twelve color filters is formed. The cross-sectional area of thespacer is about 500 μm².

The spacer has a cylindrical shape, so that a diameter of the spacer isabout 25.2 μm. The Young's modulus of the spacer is about 487 N/mm².

When spacers are formed, such that the spacers one-to-one correspond tothe color filter, a size of the spacer may be obtained by dividing 500μm² by 12 to get about 41.7 μm².

That is, in case that the spacers are formed, such that a count of thespacers is equal to the number of the color filter, the area of thespacer is about 41.7 μm².

With the comparative liquid crystal display panel, the cross-sectionalarea of the spacer and the density of the objective liquid crystaldisplay panel may be obtained.

In a macroscopic view, increasing the density of the spacer is similarto increasing the cross-sectional area of the spacer in effect.

A stiffness factor ‘A’ is introduced and defined by following Expression4. The stiffness factor means a degree of transformation of the spacer.A=a×B×C,  Expression 4

wherein ‘A’ denotes the stiffness factor, ‘a’ denotes a compensatingconstant defined by (area of color filter of comparative liquid crystaldisplay panel)/(area of color filter of objective liquid crystal displaypanel), ‘B’ denotes the cross-sectional area of the spacer, and ‘C’denotes the density of the spacer (or the count of the spacer per colorfilter).

For example, in case that one spacer is formed per twelve color filters,‘C’ is 1/12.

Young's modulus of the spacer is about 487 N/mm².

In Expression 4, a value of B×C is preserved. That is, when ‘B’increases, ‘C’ decreases. When ‘C’ increases, ‘B’ decreases. In otherwords, when the density of the spacers increases, the cross-sectionalarea of the spacers decreases.

Thus, the area of a total contact region between the spacers and thefirst or second substrate is fixed.

The compensating constant ‘a’ compensates a difference between thecomparative liquid crystal display panel and the objective liquidcrystal display panel. In case that the size of the objective liquidcrystal display panel is substantially equal to the size of thecomparative liquid crystal display panel, the compensating constant ‘a’is equal to 1.

When the size of the objective liquid crystal display panel is largerthan the size of the comparative liquid crystal display panel, thecompensating constant ‘a’ is smaller than 1. When the size of theobjective liquid crystal display panel is smaller than the size of thecomparative liquid crystal display panel, the compensating constant ‘a’is larger than 1.

As the compensating constant ‘a’ becomes smaller, the stiffness factor‘A’ becomes smaller. As the compensating constant ‘a’ becomes larger,the stiffness factor ‘A’ becomes larger.

For example, in case that the area of the color filter of the objectiveliquid crystal display panel having 40 inch size is 227 μm×681 μm andthe area of the comparative liquid crystal display panel is 88 μm×264μm, the compensating constant a₄₀ is about 0.15 that is obtained bydividing (88×264) by (227×681).

Thus, the stiffness factor ‘A’ becomes smaller.

The cross-sectional area of the spacer ‘B’ may be determined byconsidering the distance between the color filters. A diameter of thespacer may be less than the distance between the color filters. In casethat the diameter of the spacer is larger than the distance, the spacerinvades the color filter, so that the display quality is lowered.

For example, when the distance between the color filters is in a rangefrom about 30 μm to about 45 μm, a diameter ‘D’ of the spacer may be 35μm that is less than 45 μm preferably. Then, the cross-sectional area ofthe spacer ‘B’ is about 800 μm² that is obtained from [π×(D/2)²].

Thus, when the stiffness factor ‘A’, the compensating constant ‘a’ andthe cross-sectional area ‘B’ is determined, the density ‘D’ of thespacer may be obtained from Expression 4. The stiffness factor ‘A’ isdetermined, such that the first and second substrates are not broken andthe unfilled region is not formed.

Hereinafter, a method of determining the stiffness factor ‘A’ isexplained.

FIG. 28A is a graph showing a relation between a cell gap and astiffness factor, when a Young's modulus is about 487 N/mm².

The graph was obtained by simulation.

Referring to FIG. 28A, when a stiffness factor is in a range from about0 μm² to about 30 μm², a cell gap increases rapidly. When the stiffnessfactor is larger than about 30 μm², the cell gap increases slowly.

A liquid crystal display apparatus of twisted nematic liquid crystal, athickness of the liquid crystal layer is about 4.65 μm. When thethickness of the liquid crystal layer is over 4.75 μm, the liquidcrystal display apparatus is treated as a malproduct due to poor displayquality.

Thus, an allowable maximal cell gap is 4.75 μm. The stiffness factorcorresponding to the allowable maximal cell gap is about 76 μm².

Thus, the cell gap is designed, such that the stiffness factor is lessthan 76 μm².

In a vertical alignment mode, the maximum allowable cell gap may beobtained by the graph of FIG. 28A.

When the stiffness factor is over about 76 μm², the spacer is too stiff.Thus, the spacer is seldom compressed, when the first and secondsubstrate are assembled together. When the spacer is not compresseduntil the spacer has a height that is substantially equal to theallowable liquid crystal cell gap H2 of FIG. 27, a liquid crystaldisplay panel includes an unfilled region. Thus, the display quality islowered. The unfilled region corresponds to a hatched region.

According to the graph of FIG. 28A, when the stiffness factor is lessthan about 76 μm², the liquid crystal display device includes nounfilled region.

As a compression ratio increases, a compressive stress applying to thefirst and second substrate increases.

FIG. 28B is a graph showing a relation between a compression ratio and astiffness factor, when a Young's modulus is about 487 N/mm².

Referring to FIG. 28B, as a stiffness factor decreases, a compressionratio increases. As the stiffness factor increases, the compressionratio decreases.

When the compression ratio is over about 15%, a spacer may damage thefirst and second substrates, in case of Young's modulus of the spacer isabout 487 N/mm².

The compression ratio of 15% means that a spacer having 100 μm height iscompressed to have 85 μm height for example.

The stiffness factor corresponding to the compression ratio of 15% isabout 32 μm². The stiffness factor is inversely proportional to thecompression ration as shown in FIG. 28B. Thus, when the compressionratio less than about 15%, the stiffness factor is more than about 32μm².

As a result of FIGS. 28A and 28B, in case of a Young's modulus of thespacer is about 487 N/mm², the stiffness factor ‘A’ of Expression 4, isin a range from about 32 μm² to about 76 μm².

The range of the stiffness factor may be adjusted according to theYoung's modulus of the spacer.

FIG. 29A is a graph showing a relation between a cell gap (or acompression ratio) and a stiffness factor, when Young's modulus is about243.5 N/mm².

Referring to FIG. 29A, when Young's modulus is lowered from about 487N/mm² to about 243.5 N/mm², the stiffness factor corresponding to anupper limit of region where no unfilled region is formed increases fromabout 76 μm² to about 120 μm².

The stiffness factor corresponding to the compression ratio of 15%, thatis corresponding to a lower limit of region where the first and secondsubstrates are not damaged increases from about 32 μm² to about 66 μm².

Thus, the spacer is designed, such that the stiffness factor is in arange from about 66 μm² to about 120 μm², in case that the Young'smodulus is about 243.5 N/mm².

Comparing with the previous result, when Young's modulus becomes a half,an upper limit and a lower limit of the range of the stiffness factorbecome double respectively.

FIG. 29B is a graph showing a relation between a cell gap (or acompression ratio) and a stiffness factor, when Young's modulus is about974 N/mm².

Referring to FIG. 29B, when Young's modulus is increased from about 487N/mm² to about 974 N/mm², the stiffness factor corresponding to an upperlimit of region where no unfilled region is formed decreases from about76 μm² to about 40 μm².

The stiffness factor corresponding to the compression ratio of 15%, thatis corresponding to a lower limit of region where the first and secondsubstrates are not damaged decreases from about 32 μm² to about 18 μm².

Thus, the spacer is designed, such that the stiffness factor is in arange from about 18 μm² to about 40 μm², in case that Young's modulus isabout 974 N/mm².

Comparing with the previous result, when the Young's modulus becomes adouble, an upper limit and a lower limit of the range of the stiffnessfactor become a half respectively.

In short, the range of the stiffness factor is changed, when Young'smodulus is changed.

Thus, in order to compensate the difference of Young's modulus, therange of the stiffness factor is adjusted as the following Expression 5.(Ycom/Yob)×32 μm² ≦A≦(Ycom/Yob)×76 μm²,  Expression 5

wherein Ycom denotes Young's modulus of a comparative liquid crystaldisplay panel, and Yob denotes Young's modulus of an objective liquidcrystal display panel.

In Expression 5, Young's modulus of the comparative liquid crystaldisplay panel Ycom is 487 N/mm².

Referring again to FIG. 27, the spacers 1200 are formed on the firstelectrode 1140 by the stiffness factor, such that the spacers 1200deviate from the color filters 1132, 1134 and 1136.

The spacer 1200 has a first height H1.

The liquid crystal is dropped and filled to have the depth correspondingto the allowable liquid crystal cell gap H2.

FIG. 30 is a schematic plan view showing a thin film transistorsubstrate according to a seventh exemplary embodiment of the presentinvention.

Referring to FIG. 30, a second substrate 1400 includes a transparentsubstrate 1410, a thin film transistor (not shown) and a secondelectrode 1420.

The second electrode 1420 faces the color filter 1130 of the firstsubstrate 1100 of FIG. 27.

The second electrode 1420 is electrically connected with the thin filmtransistor.

The first substrate 1100 and the second substrate 1400 are assembledtogether, such that the second electrode 1420 of the second substrate1400 faces the color filter 1130 of the first substrate 1100.

Embodiment 8

In order to manufacture a liquid crystal display apparatus of FIG. 25according to an exemplary embodiment 8, a first height H1, across-sectional area and a density of the spacer 1200 are calculated.Then, the spacers 1200 are formed on a first substrate 1100 according tothe calculated first height H1, cross-sectional area and density. Theliquid crystal 1300 is provided to the first substrate 1100. The firstsubstrate 1100 and the second substrate 1400 are assembled together.

The first height H1 of the spacers 1200 is higher than the allowableliquid crystal cell gap H2. The cross-sectional area of the spacers 1200is designed, such that the spacers 1200 having the first height H2 maybe compressed to a height corresponding to the allowable liquid crystalcell gap H2.

The cross-sectional area and the density of the spacers 1200 may beobtained from Expressions 4 and 5.

When the cross-sectional area and the density of the spacers 1200 may beobtained, the first substrate 1100 is formed.

FIGS. 31A to 31J are a schematic view showing a process of manufacturinga color filter substrate according to an eighth exemplary embodiment ofthe present invention.

FIG. 31A is a schematic cross-sectional view showing a chromium thinfilm formed on a transparent substrate.

Referring to FIG. 31A, a chromium (Cr) thin film 1125 is coated on oneface of a transparent substrate 1110. The chromium thin film 1125 may becoated on the transparent substrate 1110 by chemical vapor deposition(CVD) or a sputtering method.

FIG. 31B is a schematic cross-sectional view showing a process ofmanufacturing a photoresist pattern.

Referring to FIG. 31B, a photoresist is coated on a chromium thin film1125 by a spin coating method or a slit coating method.

Then, a pattern mask 1127 is disposed over the transparent substrate1110. The pattern mask 1127 has a lattice shape.

FIG. 31C is a plan view showing a pattern mask of FIG. 32B.

Referring to FIG. 31C, the pattern mask 1127 includes a glass substrate1128 and chromium pattern 1129. The glass substrate 1128 is transparent.The chromium pattern 1129 is coated on the glass substrate 1128. Thechromium pattern 1129 includes openings 1129 a.

A light is incident onto the pattern mask 1127. A first portion of thelight that arrives at the openings 1129 a passes through the patternmask 1127 to arrive at the photoresist. A second portion of light thatarrives at the chromium pattern 1129 is intercepted by the chromiumpattern 1129.

The photoresist exposed to the light is removed. The photoresist that isnot exposed to the light remains to form a photoresist pattern.

FIG. 31D is a schematic cross-sectional view showing a black matrixformed on a transparent substrate.

Referring to FIG. 31D, a first portion of the chromium is protected bythe photoresist pattern. A second portion 1120 of the chromium is notprotected by the photoresist pattern. The second portion 1121 of thechromium is etched, and the first portion of the chromium remains toform a black matrix. Hereinafter, a reference numeral 1120 correspondsto the black matrix, and a reference numeral 1121 corresponds to agroove formed by eliminating the second portion of the chromium.

The photoresist pattern on the black matrix is eliminated by ashing.

FIG. 31E is a schematic cross-sectional view showing a color filtersformed on a transparent substrate, a first electrode formed on the colorfilters.

Referring to FIG. 31E, color filters 1130 are formed in the groove 1121,such that an edge of the color filters 1130 overlaps with the blackmatrix 1120.

The color filters 1130 includes a red color filter 1132, a green colorfilter 1134 and a blue color filter 1136.

A first electrode 1140 is formed on the color filters 1130. The firstelectrode 1140 may be formed by chemical vapor deposition (CVD). Thefirst electrode 1140 includes indium tin oxide (ITO) or indium zincoxide (IZO). The indium tin oxide (ITO) and indium zinc oxide (IZO) aretransparent and electrically conductive.

FIG. 31F is a schematic cross-sectional view showing a process offorming spacers on a first electrode.

Referring to FIG. 31F, a thin film 1210 is formed on the first electrode1210, such that a thickness of the thin film 1210 is about H1 of FIG.27. The thin film 1210 may be formed by spin coating method or slitcoating method.

Young's modulus of the thin film 1210 determines Young's modulus of thespacer.

The thin film 1210 is photosensitive.

A pattern mask 1220 is disposed over the thin film 1210.

FIG. 31G is a plan view of a pattern mask of FIG. 31F.

Referring to FIG. 31G, the pattern mask 1220 includes openings 1225 forforming spacers. An area of the openings 1225 is substantially equal toa cross-sectional area of the spacers.

A first portion of the thin film is exposed to a light, and a secondportion of the thin film is not exposed to the light. The first portionof the thin film remains and the second portion of the thin film iseliminated, so that the spacers are formed.

FIG. 31H is a schematic cross-sectional view showing a process ofdropping liquid crystal.

Referring to FIG. 31H, when spacers 1200 are formed on the firstelectrode 1140, a dispenser 1310 drops liquid crystal 1300, until adepth of the liquid crystal reaches to an allowable liquid crystal cellgap H2.

FIG. 31I is a cross-sectional view showing a thin film transistor and acolor filter substrates assembled with each other to form a liquidcrystal display panel.

Referring to FIG. 31I, when liquid crystal is filled at a firstsubstrate (or a color filter substrate) 1100, the first substrate 1100is assembled with a second substrate (or a thin film transistorsubstrate) 1400. The second substrate 1400 includes a thin filmtransistor and a second electrode 1410.

The first and second substrates 1100 and 1400 are compressed, such thatthe spacers 1200 has a height that is substantially equal to theallowable liquid crystal cell gap H2 of FIG. 31H.

FIG. 31J is a cross-sectional view showing a liquid crystal displaypanel having spacers of which on end is tapered.

Referring to FIG. 31J, spacers 1200 may have a tapered end.

Having described the exemplary embodiments of the present invention andits advantages, it is noted that various changes, substitutions andalterations can be made herein without departing from the spirit andscope of the invention as defined by appended claims.

1. A method of manufacturing a liquid crystal display apparatuscomprising: forming a first substrate including a display region fordisplaying an image; forming a second substrate; calculating a densityand a cross-sectional area of a plurality of spacers; forming thespacers on the first substrate according to the calculated density andthe cross-sectional area; forming a fence on the first substrate, suchthat the fence surrounds the display region to form a space defined bythe first substrate and the fence; dropping liquid crystal in the spaceto fill the space; and assembling the first and second substrates witheach other, wherein the density and the cross-sectional area arecalculated by using a stiffness factor ‘A’ expressed by, A=a×B×C, where‘a’ denotes a constant defined by (area of a color filter of acomparative liquid crystal display panel)/(area of a color filter of anobjective liquid crystal display panel), ‘B’ denotes the cross-sectionalarea of at least one of the spacers, and ‘C’ denotes the density of thespacers (or a number of the spacers per color filter).
 2. The method ofclaim 1, wherein the second substrate comprises a plurality of pixelelectrodes, the spacers being formed such that the spacers deviate fromthe pixel electrodes.
 3. The method of claim 1, wherein the firstsubstrate comprises a black matrix and a common electrode, the spacersbeing formed such that the spacers are disposed over the black matrix.4. The method of claim 1, wherein an allowable range of the stiffnessfactor ‘A’ is determined by: forming a graph showing a relation betweenthe stiffness factor and a cell gap, and a relation between thestiffness factor and a compression ratio by using the comparative liquidcrystal display panel, wherein a size of the comparative liquid crystaldisplay panel is fixed, and spacers of the comparative liquid crystaldisplay panel have a fixed Young's modulus; and obtaining the allowablerange having a maximum value and a minimum value from the graph.
 5. Themethod of claim 4, wherein the maximum value corresponds to a maximumallowable cell gap, and the minimum value corresponds to a maximumallowable compression ratio.
 6. The method of claim 5, wherein themaximum allowable cell gap is obtained by adding a margin to a thicknessof the liquid crystal layer.
 7. The method of claim 6, wherein thethickness is about 4.65 μm, and the margin is about 0.1 μm.
 8. Themethod of claim 5, wherein the first and the second substrates aredamaged when the spacers are compressed above the maximum allowablecompression ratio.
 9. The method of claim 8, wherein the maximumallowable compression ratio is about 15%.
 10. The method of claim of 4,wherein the comparative liquid crystal display panel corresponds to a 17inch super extended graphics array (SXGA) liquid crystal display panel,and the allowable range of the stiffness factor ‘A’ is expressed by(Ycom/Yob)×32 μm² ≦A≦(Ycom/Yob)×76 μm², where Ycom is Young's modulus ofthe comparative liquid crystal display panel, and Yob is Young's modulusof the objective liquid crystal display panel.